Silicon Run’s film MEMS: MAKING MICRO MACHINES is an overview of the manufacture and design of microelectromechanical systems. This film shows the fabrication, testing and packaging, and design of some of our most common MEMS devices. This film also features the fabrication of Hewlett-Packard’s thermal inkjet printhead and covers the testing and packaging of Texas Instrument’s digital micromirror devices. At Freescale Semiconductor, we delve into the design process with a look at the creation of sensors.

42 minutes / 2009

I had the pleasure of watching MEMS: Making Micro Machines and found it a great educational tool for industry and academia alike. The interplay between the animation and real live scenarios provides an extraordinary view of MEMS technology. -Karen Lightman, Managing Director
MEMS Industry Group

MEMS: Making Micro Machines Topic Summary

  • Micro Fluidics
  • MEMS Mechanical and Electrical Components
  • Fabrication Process of the Thermal Inkjet Printhead
  • Surface and Bulk Micromachining
  • Packaging and Testing of DMD Devices
  • Using Spring Tip Extensions to Overcome Stiction
  • Design Process Flow
  • Pressure Sensors
  • Inertial Sensors (Accelerometers and Gyroscopes)

Press Releases

Major funding provided by the National Science Foundation. Additional funding is from Freescale Semiconductor, Robert Bosch GmbH, and SEMI.